publication venue for
- A diameter 300 µm Bragg reflector for acoustic isolation of resonant micro-actuators. 21:042001-042001. 2011
- Three degree-of-freedom piezoelectric ultrasonic micro-motor with a major diameter of 350 µm. 20:125002-125002. 2010
- Sidewall slopes of SU-8 HARMST using deep x-ray lithography. 18:035037-035037. 2008
- AFM-measured surface roughness of SU-8 structures produced by deep x-ray lithography. 16:1975-1983. 2006
- Specification of mechanical support structures to prevent SU-8 stiction in high aspect ratio structures. 15:978-983. 2005