Microsystem Technologies: micro and nanosystems information storage and processing systems Journal

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Generating different profiles of gradient concentrations inside a gel-filled chamber: design and simulation. 19:623-628. 2013
Sidewall slopes and roughness of SU-8 HARMST. 14:1777-1777. 2008
Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures. 13:487-493. 2007
Production issues for high aspect ratio Lobster-eye optics using LIGA. 13:511-515. 2007
Overcoming SU-8 stiction in high aspect ratio structures. 11:221-224. 2005
Production issues for high aspect ratio Lobster-eye optics using LIGA. 9:55-60. 2002
Side wall roughness in ultradeep X-ray lithography. 9:130-132. 2002
Sidewall slopes and roughness of SU-8 HARMST 2008

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Mechanical Engineering & Transports (Science Metrix)
Nanoscience & Nanotechnology (Science Metrix)