Effects and thermal stability of hydrogen microwave plasma treatment on tetrahedral amorphous carbon films by in situ ultraviolet photoelectron spectroscopy Academic Article uri icon

authors

  • Chua, Daniel HC
  • Hsieh, Jovan
  • Gao, Xingyu
  • Qi, Dongchen
  • Chen, Shi
  • Varghese, Binni
  • Sow, Chorng Haur
  • Wee, ATS
  • Lu, Jiong
  • Loh, Kian Ping
  • Yu, Xiaojiang
  • Moser, Herbert O

publication date

  • July 15, 2009