Realization of Si 1-x-y Ge x C y /Si heterostructures by pulsed-laser-induced epitaxy of C+implanted pseudomorphic SiGe films and of a-SiGeC:H films deposited on Si(100) Conference Paper uri icon

authors

  • Boulmer, Jacques
  • Desmur-Larre, A
  • Guedj, C
  • Debarre, D
  • Boucaud, Philippe
  • Julien, Francois H
  • Finkman, Elieser
  • Nugent, Keith A
  • Laval, R
  • Ozenne, J-B
  • Yang, H
  • Bouchier, D
  • Godet, Christian
  • Roca i Cabarrocas, Pere
  • Calvarin, G
  • Clerc, C

publication date

  • April 10, 1995