Realization of Si1-x-yGexCy/Si heterostructures by pulsed-laser-induced epitaxy of C+ implanted pseudomorphic SiGe films and of a-SiGeC:H films deposited on Si(100) Conference Paper uri icon

authors

  • Boulmer, J
  • Desmur-Larre, A
  • Guedj, C
  • Debarre, D
  • Boucaud, P
  • Julien, FH
  • Finkman, E
  • Nugent, KA
  • Laval, R
  • Ozenne, JB
  • Yang, H
  • Bouchier, D
  • Godet, C
  • Roca i Cabarrocas, P
  • Calvarin, G
  • Clerc, C

publication date

  • January 1, 1995