Realization of heterostructures by pulsed laser induced epitaxy of C+ implanted pseudomorphic SiGe films and of a-SiGeC: H films deposited on Si(100) Academic Article uri icon

authors

  • Boulmer, J
  • Boucaud, P
  • Guedj, C
  • Débarre, D
  • Bouchier, D
  • Finkman, E
  • Prawer, S
  • Nugent, K
  • Desmur-Larré, A
  • Godet, C
  • Roca i Cabarrocas, P

publication date

  • December 1995