authors

• Nugent, Keith
• Li, Enbang
• Chicharo, Joe F
• Xi, Jiangtao

editors

• Nugent, Keith

status

• published 

publication date

• March 25, 2004

published in

• Proceedings of SPIE - The International Society for Optical Engineering  Journal

presented at event

• Microelectronics, MEMS, and Nanotechnology  Conference

keywords

• BANDS
• BENDS
• FABRICATION
• HOLOGRAPHIC LITHOGRAPHY
• Optics
• Physical Sciences
• Physics
• Physics, Applied
• SILICON
• Science & Technology
• interference
• laser beam
• photonic crystal

Digital Object Identifier (DOI)

• 10.1117/12.523239

International Standard Book Number (ISBN) 10

• 0-8194-5170-3

Publisher

• SPIE

start page

• 328

end page

• 333

volume

• 5277