Single atom Si nanoelectronics using controlled single-ion implantation Conference Paper uri icon

authors

  • Mitic, M
  • Andresen, SE
  • Yang, C
  • Hopf, T
  • Chan, V
  • Gauja, E
  • Hudson, FE
  • Buehler, TM
  • Brenner, R
  • Ferguson, AJ
  • Pakes, CI
  • Hearne, SM
  • Tamanyan, G
  • Reilly, DJ
  • Hamilton, AR
  • Jamieson, DN
  • Dzurak, AS
  • Clark, RG

publication date

  • March 2005