Single Phosphorus Ion Implantation into Prefabricated Nanometre Cells of Silicon Devices for Quantum Bit Fabrication Conference Paper uri icon

authors

  • Yang, Changyi
  • Jamieson, David N
  • Pakes, Chris
  • Prawer, Steven
  • Dzurak, Andrew
  • Stanley, Fay
  • Spizziri, Paul
  • Macks, Linda
  • Gauja, Eric
  • Clark, Robert G

publication date

  • June 30, 2003