Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures
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Overview
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Research
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Engineering
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Engineering, Electrical & Electronic
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LIGA
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MICROFABRICATION
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Materials Science
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Materials Science, Multidisciplinary
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Nanoscience & Nanotechnology
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Physical Sciences
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Physics
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Physics, Applied
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RESIST
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Science & Technology
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Science & Technology - Other Topics
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Technology
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X-RAY-LITHOGRAPHY
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deep X-ray lithography
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densely packed high aspect ratio structures
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stiction
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Springer Science and Business Media LLC
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