LIGA fabrication of high-aspect-ratio lobster-eye optics
Conference Paper
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- Research
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Overview
status
publication date
published in
presented at event
Research
keywords
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Engineering
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Engineering, Electrical & Electronic
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Instruments & Instrumentation
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LIGA
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Optics
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Physical Sciences
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Science & Technology
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Technology
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X-RAY-LITHOGRAPHY
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lobster-eye optics
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x-ray optics
Identity
Digital Object Identifier (DOI)
International Standard Book Number (ISBN) 10
Additional Document Info
Publisher
start page
end page
volume