Process optimisation for compact high aspect ratio SU-8 microstructures using x-ray lithography
Conference Paper
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Overview
status
publication date
published in
presented at event
Research
keywords
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CHEMICALLY AMPLIFIED RESISTS
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Engineering
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Engineering, Electrical & Electronic
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Nanoscience & Nanotechnology
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Optics
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Physical Sciences
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SIMULATION
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Science & Technology
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Science & Technology - Other Topics
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Taguchi optimisation
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Technology
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development rate
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dimensional error
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space-to-feature ratio
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x-ray lithography
Identity
Digital Object Identifier (DOI)
International Standard Book Number (ISBN) 10
Additional Document Info