Process optimisation for compact high aspect ratio SU-8 microstructures using x-ray lithography Conference Paper

Overview
Identity
Additional Document Info
View All

authors

Vora, KD
Shew, BY
Harvey, EC
Hayes, JP
Peele, AG

status

published

publication date

December 28, 2005

published in

Proceedings of SPIE - The International Society for Optical Engineering Journal

presented at event

Microelectronics, MEMS, and Nanotechnology Conference