Investigation of Mass Transport during SiC PVT Growth Using Digital X-Ray Imaging, 13C Labeling of Source Material and Numerical Modeling Conference Paper uri icon

authors

  • Wellmann, Peter J
  • Herro, ZG
  • Selder, M
  • Durst, F
  • Püsche, Roland
  • Hundhausen, Martin
  • Ley, Lothar
  • Winnacker, Albrecht

publication date

  • January 1, 2003