Contactless Measurement of the Thermal Conductivity of Thin SiC Layers
Academic Article
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- Research
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Overview
publication date
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published in
Research
keywords
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CVD
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DEPENDENCE
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Materials Science
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Materials Science, Coatings & Films
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Materials Science, Multidisciplinary
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RAMAN-SCATTERING
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Raman spectroscopy
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SILICON
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Science & Technology
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TEMPERATURE
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Technology
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annealing
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laser
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thermal conductivity
Identity
Digital Object Identifier (DOI)
International Standard Book Number (ISBN) 10
Additional Document Info
Publisher
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Trans Tech Publications, Ltd.
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