Raman Spectroscopy on Biaxially Strained Epitaxial Layers of 3C-SiC on Si
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Overview
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Research
keywords
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APCVD
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CHEMICAL-VAPOR-DEPOSITION
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FILMS
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GROWTH
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Materials Science
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Materials Science, Coatings & Films
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Materials Science, Multidisciplinary
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OPTICAL PHONONS
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PRESSURE
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Raman spectroscopy
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STRESS
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Science & Technology
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Technology
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biaxial strain
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residual stress
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Digital Object Identifier (DOI)
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Trans Tech Publications, Ltd.
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