Potential influence on copper electrodeposition on scratched silicon surfaces
Academic Article
-
- Overview
-
- Research
-
- Identity
-
- Additional Document Info
-
- View All
-
Overview
status
publication date
has subject area
published in
Research
keywords
-
ELECTROCHEMICAL DEPOSITION
-
FABRICATION
-
GROWTH
-
Materials Science
-
Materials Science, Ceramics
-
Science & Technology
-
Technology
-
copper
-
electrochemical metal deposition
-
scratching
-
silicon
Identity
Digital Object Identifier (DOI)
Additional Document Info
Publisher
-
Springer Science and Business Media LLC
start page
end page
volume
issue