Spectroscopic ellipsometry of TaNx and VN films Conference Paper uri icon

authors

  • van Riessen, Grant
  • Mistrik, J
  • Takahashi, K
  • Antos, R
  • Aoyama, M
  • Yamaguchi, T
  • Anma, Y
  • Fukuda, Y
  • Takeyama, MB
  • Noya, A
  • Jiang, Z-T
  • Thurgate, SM
  • Riessen, GV

publication date

  • May 2004